II. Check Lists

To open the load lock to argon/atmosphere and load or remove samples:

0. Check to be sure the gate valve between the load lock and prep chamber is closed!

1. Close the valve to the rough pump [y] and the isolation valve [z].

2. Turn on the Ar container and check the tube for a slow flow of gas. Hook up the tube to the nozzle below valve [x].

3. Slowly open valve [x]. Then, open isolation valve [z] to let the load lock fill with Ar gas (takes a minute or two).

4. Open load lock door.Load sample in transfer mechanism.

5. Close load lock door.

To pump down load lock:

1. Close Ar gas inlet valve [x]

2. Close manipulator differential pumping valve [R].

3. As the load lock door is held firmly shut by hand, slowly open the valve to the rough pump [y].

4. After the roughing pump has started pumping down (~1min.), open the manipulator differential pumping valve [R] (up to 3-5 threads showing).

5. The sample should be pumped down a minimum of 30min. (to outgas sample and chamber) before introducing it into the Prep chamber. Powders and porous samples should be out-gassed overnight. Turn off the Ar container.

To transfer sample to Prep chamber:

0. Check to be sure the gate valve between the prep and analysis chambers is closed.

1. After the sample has been out-gassed and the load lock pressure is around .02mbar, close the isolation valve [z] and slowly open the gate valve to the Prep chamber (keep an eye on the prep pressure).

2. Extend transfer mechanism into Prep chamber and transfer sample to the Prep position with the fork; using the lower groove of the two on the puck.

3. Retract the transfer mechanism back into the load lock

4. Close the gate valve between load lock and Prep chamber.

5. Reopen the isolation valve [z].

To turn X-rays on:

0. Check aperture (usually want A1) and iris position.

1. Place sample in small area XPS position and move X-ray anode in towards sample (don't hit it!).

2. Plug fan in. Switch on cooling water [K] and make sure by-pass valve is open.

3. With emission at the OFF position, select anode [unit 360] and energy [unit 362] for Mg or Al.

4. Turn start current, anode voltage and emission Cal knobs fully CCW to starting position.

5. Turn emission knob from off to start [unit 360].

6. Press anode power ON (Mains) [F] and punch high voltage button on.

8. Turn channeltron ON [E].

9. Set MINS position to COMP [unit 362].

10. Turn both Power and High Voltage ON [unit 454]. Turn Lens Power Supply ON [unit 356B].

To turn X-rays off:

1. Turn channeltron OFF [E].

2. Press anode power OFF (Mains) [F].

3. Return Emission dial to OFF.

4. Turn Emission Cal knob fully CCW. Turn Filament current fully CCW.

5. Turn anode voltage knob fully CCW.

6. Turn both Power and High Voltage OFF [unit 454]. Turn Lens Power Supply OFF [unit 356B].

6. After anode cools 30 minutes, turn water OFF [K]

To turn X-rays on:

1. Turn water on [K]

2. When emission still OFF, select Al MONO

3. Make sure butter-fly valve is open, make sure by-pass valve is open

4. Turn start current, anode voltage and emission Cal fully ccw

5. Turn emission switch to START, turn anode power ON [F]

6. Set

filament (start) current = 4 A

anode voltage = 15 KV

emission to 20 mA (max)

focus = 5 to 7 Emission < 20 mA

7. Check chamber pressure (P < 5x10-9 torr) [J]

8. Turn channeltron ON [E]; Unit 454: turn Power and High Voltage ON

To shut down monochromated X-rays:

1. Turn channeltron OFF [E]

2. Press Main OFF [F]

3. Return emission switch to OFF

4. Turn emission Cal knob fully CCW

5. Turn anode voltage knob fully CCW

6. Return focus to zero

7. Turn power OFF [F]

8. After anode cools 30 minutes, turn water OFF

To Sputter a sample:

1. Turn channeltron OFF [E].

2. Turn X-ray power down. Reduce emission current and anode voltage.

3. Isolate ion pump from analysis chamber by closing both the By-Pass [B.P.V.] and Butterfly [B.V.] Valves.

4. Open Differential Pump [D.P.] valve to prep chamber.

5. Close gate valve between prep and analysis chambers.

6. Turn Ion Gun Control ON [unit 615 A]; select ion sputter energy (5KV typical) [remote knob].

7. Turn Physical Imaging Unit ON [unit 346]; set Video-Gain to Slave/Off and Magnification to 2 (typical).

8. Turn Digital Electrostatic Scan Unit ON [unit 384 F]; set Scan Mode to TV.

9. Slowly leak Ar (ion source gas) [small canister] into the ion gun.
Keep Prep pressure < 1 x 10-6 and Analysis pressure < 1 x 10-7!

10. Set knob [unit 363] to mA to monitor target current (~1 to 1.5 m A).

11. Set MINS to SIG AVG [unit 362] to BEGIN SPUTTER.

12. Check pressure; close down Ar leak as needed to maintain.

To shut off Sputter:

1. Turn MINS from SIG AVG to COMP [unit 362]; sputter STOPS.

2. Close Ar leak valve (not too tight).

3. Reduce sputter energy to 1 kV.

4. Turn Ion Gun Control power OFF [A].

5. Set knob [unit 363] back to V.

6. Turn Physical Imaging Unit OFF [unit 346].

7. Wait until Analysis pressure recovers to < 10-8:

7.1 Close Differential Pump [D.P.] valve
7.2 Open Butterfly [B.V.] Valve
7.3 Open By-Pass [B.P.V.] Valve

To Turn Flood Gun ON:

1. Filament current and emission dials should be at 0

2. Turn power ON [B]

3. Mode switch set to 1

4. Turn up filament current to approximately 2 amps

5. Increase emission to 0.2 mA (about 8-9 on the dial)

5. Adjust energy mode 0-14 as needed

Shut Down:

1. Reduce energy mode, emission, and then filament current to 0.0

2. Turn power OFF [B]

System On:

1. Put sample into position for small area XPS, (see blackboard for latest numbers).

2. Retract the twin anode (turn counter clockwise).

3. Turn OFF light source in Analysis Chamber and cover both windows.

4. Turn on the 9'' Hitachi T.V. monitor, set CCD/SEM switch to SEM.

5. Unit 432, SEM Gun Supply: turn High Voltage and Filament fully ccw, set

Emission current limit to 0.1 mA.

6. Unit 432: turn on Power, High Voltage and Filament.

7. Slowly turn the filament current to ~2 Amps., take 5~10 minutes.

8. Slowly turn up the high voltage, stop at emission current ~0.12 mA, wait for the

regulating circuit to "kick in", then set the high voltage as needed (10kv typical).

9. Turn the Digital Volt Meter(DVM) on Unit 363[D] to nA,

10. Use Spot Size dial on Unit 432[C] to obtain ~10 nA target current on the DVM.

11. Turn up the filament current(Max. 2.5 Amps.) until the target current saturates.

12. Unit 384F Scan Mode set to TV.

13. Turn the scintillator switch to ON/ON, DVM selector to PM(photo-multiplier).[D]

14. Turn up PM voltage to ~600V[D], a picture should appear on the 9" monitor.

15. For Auger, turn the scintillator to OFF/OFF, turn PM fully ccw [D], then check

Unit 363: DVM set to V [D]; Unit [E]: Channeltron ON;

Unit 362: MINS set to COMP; Unit 454: Power ON, High Voltage ON.

Shut Down:

1. Turn Channeltron OFF[E].

2. Unit 363[D]: PM volts fully ccw; scintillator set to OFF/OFF; DVM set to V.

3. Unit 432[C]: High Voltage and Filament fully ccw, H.V., Filament and Power OFF.

4. Turn the 9" T.V. monitor off; turn CCD camara off by setting CCD/SEM to SEM.

Watch for flash-overs. Ramp filament current up slowly to extend its lifetime. Saturate emission current by increasing filament current; but do not exceed 2.5 A for the filament current.

To Turn ON:

1. Switch main power ON [G].

2. Turn Emission and MESH BIAS knobs fully CW.

3. Turn EHT switch to ON.

6. Adjust MESH BIAS to bring LEED pattern into view

To Turn LEED OFF:

1. Set EHT to OFF

2. Set Energy and Filament current fully CCW (minimum)

3. Set MESH BIAS and Emission fully CW (maximum)

4. Turn main power OFF [G]

ONLY start LEED with pressure < 1 x 10-9.

Switch off the EHT when plugging in or taking out the remote control

To Log-on Direct wired Terminal:

1. Run ZSTEM terminal emulator (see facility personnel)

2. At $ prompt type: log micro/rsx and then <CR>

3. At $ type: VGS and then <CR>

At this point you should be in the main menu of VGS and ready to setup an experimental file and/or analyze data

To Log Out

1. Return to VGS main menu

2. Press <ENTER> to get $ prompt

3. AT $ type LOG (current time and total task time will be display and then system will log you out)

4. At $ press ALT and Z keys simultaneously to get back to ZSTEM menu

5. At ZSTEM? type HA and Y for yes to the question

Do not attempt to use the HP plotter if you are not in room 352. Use <Alt>-<Print Screen> instead(delivers plot to local printer).

The PowerStation keyboard from KEA is recommended.

Zstem Settings: Baud rate: 9600, Terminal mode VT200/7-bit, and no parity

To Restart the PDP:

1. A short time after starting, it will ask for the time and date.

Enter as hh:mm dd-mm-yy. For example, 14:09 01-Mar-98.

2. After about 3 min., the initialization batch files will run.

[VGS5250]VGS5250.CMD
[EDP]EDP.CMD
[1,2]USERCOMMS.CMD

3. You will be given a prompt and must log on to the PDP.

$ log micro/rsx <Enter>
The log on batch files will run:
[1,2]SYSLOGIN.CMD

4. The timing of the kernel has to be fixed.

$ ope 21256/knl <Enter>
#### #### 74 <Enter>
#### #### <Enter>
Hit the <Break> on the keyboard function keys (upper left).
This will give an i/o error and put you back at the prompt.

5. (OPTIONAL) To reset the video display:

Hit the <Set-Up> on the keyboard function keys (upper left).
This will take you to the video monitor control screen.
Use the arrow keys to move down to Reset Session and hit the <Enter> on the numeric keypad.
Hit the <Set-Up> key, again, to return to the prompt.

6. Type VGS at the prompt to start.

To Change Screen Colors:

1. Hit the <Set-Up> on the keyboard function keys (upper left).

2. Use the arrow keys to move to Color Setup and hit the <Enter> on the numeric keypad.

3. Adjust colors 0, 1, 2 to change the screen colors for VGS.

4. Hit the <Set-Up> key, again, to leave.

To try and recover from a plotter CRASH:

1. Turn the plotter off. Replace the paper. Turn the plotter back on.

2. Exit VGS to the $ prompt.

3. Try to reset the plotter batch programs:

$ abort/task hrdcpy <Enter>
$ abort/task copypl <Enter>
$ run copypl <Enter>
$ run hrdcpy <Enter>

4. (OPTIONAL) Flush the plotter print queue.

$ del [HPPLOTQ]PRIORITY?.DAT;* <Enter>
$ copy [EDP]XOFF.TXT pl: <Enter>

5. Rerun VGS and try to plot. Steps 3 & 4 may need to be done twice.